Browsing by Subject "Wafer map"

Browsing by Subject "Wafer map"

Sort by: Order: Results:

  • Taha, Kamal; Salah, K; Yoo, P D (IEEE, 2017-10-30)
    Identifying defect patterns on wafers is crucial for understanding the root causes and for attributing such patterns to specific steps in the fabrication process. We propose in this paper a system called DDPfinder that ...