Browsing by Author "Taha, Kamal"

Browsing by Author "Taha, Kamal"

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  • Taha, Kamal; Salah, K; Yoo, P D (IEEE, 2017-10-30)
    Identifying defect patterns on wafers is crucial for understanding the root causes and for attributing such patterns to specific steps in the fabrication process. We propose in this paper a system called DDPfinder that ...