Huang, Ning; Yan, Ying; Zhou, Ping; Kang, Renke; Guo, Dongming; Goel, Saurav
(Elsevier, 2020-05-21)
Micromachining of brittle materials like monocrystalline silicon to obtain deterministic surface topography is a 21st Century challenge. As the scale of machining has shrunk down to sub-micrometre dimensions, the undulations ...