Browsing by Author "Walker, D. D."

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    Subsurface damage in precision ground ULE® and Zerodur® surfaces
    (Optical Society of America (OSA), 2007-09-17T00:00:00Z) Tonnellier, Xavier; Morantz, Paul; Shore, Paul; Baldwin, A.; Evans, R.; Walker, D. D.
    The total process cycle time for large ULE®and Zerodur®optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE®and Zerodur®surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamics