Browsing by Author "Fox, Colin H. J."
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Item Open Access In-plane excitation of thin silicon cantilevers using piezoelectric thin films(American Institute of Physics, 2007-10) Leighton, Glenn J. T.; Kirby, Paul B.; Fox, Colin H. J.This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.Item Open Access In-plane excitation of thin silicon cantilevers using piezoelectric thin films(American Institute of Physics, 2007-10-29T00:00:00Z) Leighton, Glenn J. T.; Kirby, Paul B.; Fox, Colin H. J.This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.