Leighton, Glenn J. T.Kirby, Paul B.Fox, Colin H. J.2012-02-212012-02-212007-10-29Glenn J. T. Leighton, Paul B. Kirby, and Colin H. J. Fox. In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Applied Physics Letters, 2007, Volume 91, Issue 18, 183510.0003-6951http://dx.doi.org/10.1063/1.2805070http://dspace.lib.cranfield.ac.uk/handle/1826/7017This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.Article