Multi degree-of-freedom position sensing by combination of laser speckle correlation and range-resolved interferometry

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dc.contributor.authorCharrett, Thomas O. H.
dc.contributor.authorKissinger, Thomas
dc.contributor.authorTatam, Ralph P.
dc.date.accessioned2023-08-14T10:46:02Z
dc.date.available2023-08-14T10:46:02Z
dc.date.issued2019-06-21
dc.description.abstractThis paper reports on the development of an end-effector mounted, multi degree-of-freedom positioning sensor capable of measuring the (x,y,z) movements relative to an object. The instrument termed wPOS (workpiece Positioning Sensor), combines two complimentary non-contact optical techniques; laser speckle correlation (LSC) and Range-Resolved Interferometry (RRI). Laser speckle correlation is used to measure the in-plane position (x,y) relative to a reference point, while the RRI system provides an out-of-plane (z) absolute range measurement and correction of the in-plane LSC measurement for varying working distance. The concept and operating principles of the instrument is described along with details of the prototype sensor implementation and exemplar results showing accuracies of <30µm after 0.75m lateral travel and repeatability between measurements of ~7 µmen_UK
dc.identifier.citationCharrett TOH, Kissinger T, Tatam RP. (2019) Multi degree-of-freedom position sensing by combination of laser speckle correlation and range-resolved interferometry. In: SPIE Optical Metrology: Optical Measurement Systems for Industrial Inspection XI, 24-27 June 2019, Munich, Germanyen_UK
dc.identifier.urihttps://doi.org/10.1117/12.2525578
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/20079
dc.language.isoenen_UK
dc.publisherSPIEen_UK
dc.rightsAttribution-NonCommercial 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc/4.0/*
dc.subjectLaser speckleen_UK
dc.subjectInterferometryen_UK
dc.subjectRange Resolved Interferometryen_UK
dc.subjectDisplacement sensingen_UK
dc.subjectPositioningen_UK
dc.subjectTool pathen_UK
dc.subjectTool speeden_UK
dc.titleMulti degree-of-freedom position sensing by combination of laser speckle correlation and range-resolved interferometryen_UK
dc.typeConference paperen_UK

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