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Active magnetic bearing for ultra precision flexible electronics production system
Tantau, Mathias
(
Cranfield University
,
2015-12
)
Three-dimensional interferometric stage encoder using a single access port
Wiseman, Kieran B.
;
Kissinger, Thomas
;
Tatam, Ralph P.
(
Elsevier
,
2020-08-30
)
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Author
Kissinger, Thomas (1)
Tantau, Mathias (1)
Tatam, Ralph P. (1)
Wiseman, Kieran B. (1)
Subject
Optical encoder (2)
Active magnetic bearing (1)
AMB (1)
Dimensional metrology (1)
Diode lasers (1)
Displacement measurement (1)
Flexible electronics (1)
Grating (1)
Imaging scanning principle (1)
Interferometry (1)
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Date Issued
2020 (1)
2015 (1)