Comparative studies of PST thin films as prepared by Sol-Gel, LDCVD and sputtering techniques

Huang, Zhaorong; Donohue, P. P.; Zhang, Qi; Williams, D.; Anthony, C. J.; Todd, M. A.; Whatmore, Roger W.

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dc.contributor.author	Huang, Zhaorong
dc.contributor.author	Donohue, P. P.
dc.contributor.author	Zhang, Qi
dc.contributor.author	Williams, D.
dc.contributor.author	Anthony, C. J.
dc.contributor.author	Todd, M. A.
dc.contributor.author	Whatmore, Roger W.
dc.date.accessioned	2007-06-22T18:27:52Z
dc.date.available	2007-06-22T18:27:52Z
dc.date.issued	2002
dc.identifier.citation	Huang Z, Donohue PP, Zhang Q, et al., (2002) Comparative studies of PST thin films as prepared by Sol-Gel, LDCVD and sputtering techniques. Integrated Ferroelectrics, Volume 45, Issue 1, 2002, pp. 79-87	en
dc.identifier.issn	1058-4587
dc.identifier.uri	http://hdl.handle.net/1826/1760
dc.identifier.uri	http://dx.doi.org/10.1080/10584580215349
dc.description.abstract	Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity εr, dielectric loss tanδ, pyroelectric coefficient p, and thermal detection figure of merit Fd were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to produce high quality PST thin films.	en
dc.format.extent	519286 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en	en
dc.publisher	Taylor and Francis	en
dc.subject	Pst	en
dc.subject	Thin Films	en
dc.subject	Sol-gel	en
dc.subject	Sputtering	en
dc.subject	Liquid Delivery Cvd	en
dc.title	Comparative studies of PST thin films as prepared by Sol-Gel, LDCVD and sputtering techniques	en
dc.type	Article	en