Citation:
Shaw C, Landi S, Whatmore R, Kirby P. (2004) Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors. Integrated Ferroelectrics, Volume 63, Issue 1, pp. 93-97
Abstract:
Abstract
Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.
