Browsing by Author "Fox, Colin H. J."

Browsing by Author "Fox, Colin H. J."

Sort by: Order: Results:

  • In-plane excitation of thin silicon cantilevers using piezoelectric thin films 
    Leighton, Glenn J. T.; Kirby, Paul B.; Fox, Colin H. J. (American Institute of Physics, 2007-10-29)
    This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated ...
  • In-plane excitation of thin silicon cantilevers using piezoelectric thin films 
    Leighton, Glenn J. T.; Kirby, Paul B.; Fox, Colin H. J. (American Institute of Physics, 2007-10)
    This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated ...