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Browsing by Author Sommer, P.

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Issue DateTitleAuthor(s)
2006A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULEĀ® SurfaceFanara, C.; Shore, Paul; Nicholls, J. R.; Lyford, N.; Kelley, J.; Carr, J.; Sommer, P.
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