Tonnellier, Xavier; Morantz, Paul; Shore, Paul; Baldwin, A.; Evans, R.; Walker, D. D.
(Optical Society of America (OSA), 2007-09-17)
The total process cycle time for large ULE®and Zerodur®optics can be improved
using a precise and rapid grinding process, with low levels of surface waviness
and subsurface damage. In this paper, the amounts of defects ...