Bennett, Adam; Jourdain, Renaud; Kirby, Paul; MacKay, P.; Shore, Paul; Nicholls, John R.; Morantz, Paul
(European Society for Precision Engineering and Nanotechnology, 2016-06-30)
Activated plasma figuring using microwaves aims at providing highly efficient activated energy beams for rapid fabrication of optics.
The chemical nature of this type of energy beam leads to targeting silicon-based ...