Browsing by Author "Jiang, Hong Wen"

Browsing by Author "Jiang, Hong Wen"

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  • Fabrication of PZT actuated cantilevers on silicon-on-insulator wafers for a RF microswitch. 
    Jiang, Hong Wen; Kirby, Paul B.; Zhang, Qi (International Society for Optical Engineering - SPIE, 2003)
    A processing scheme for fabricating Pb(ZrxTi1-x)O3 thin film actuated silicon cantilevers using silicon-on-insulator wafers is described. Such piezoelectrically actuated cantilevers are being investigated for RF microswitches. ...
  • Piezoelectric thin film actuation of RF MEMS devices 
    Jiang, Hong Wen (Cranfield University, 2004)
    This thesis investigates the piezoelectric thin film actuation of RF MEMS devices. lt is demonstrated that piezoelectric actuation using silicon structures with integrated PZT thin film is suitable for RF MEMS switches ...