Duval, Fabrice F. C.; Wilson, Stephen A.; Ensell, Graham; Evanno, Nicolas M. P.; Cain, Markys G.; Whatmore, Roger W.
(Elsevier, 2007-01-08)
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were ...