Li, Runrun; Zhou, Jing; Chen, Wen; Zhang, Qi; Bao, Yiwang Bao
(Springer, 2016-05-17)
The effects of annealing temperature on the crystallinity, grain size and hence mechanical and dielectric properties of Ca(Mg1/3Ta2/3)O3 (CMT) dielectric films were systematically studied. The CMT thin films were fabricated ...